使用多种还原剂热蒸发制备氧化锌微/纳米结构的方法

Method for preparing micro-nanostructure by heat evaporation of multiple reducers

Abstract

本发明的使用多种还原剂热蒸发制备微/纳米结构氧化锌的方法属于半导体材料及其制备的技术领域。蒸发源包括ZnO粉和还原剂,还原剂可以是碳族元素材料或金属或有机化合物;在反应温度550~890℃、生长温度160~870℃、气压10<sup>5</sup>~10<sup>3</sup>Pa下制得产品。所述的蒸发源还可以掺杂其他元素或化合物。本发明通过改变具体工艺条件,获得具有多种形貌、尺寸、结构的ZnO产物。使用本发明的还原剂,相对以石墨为还原剂时反应温度可降低100~500℃。本发明对于富氧环境或/和高温下易氧化或易变质的衬底上,可在较低的温度下生长ZnO微米/纳米结构。
The invention relates to a method for preparing zinc oxide with a mircronano structure through thermal evaporation with various reductants, belonging to the semiconducting material and the preparation thereof technical field. A Evaporation source comprises zinc oxide powder and the reductanr, wherein the reductant can be carbon group element material or metal or organic compound; and a finished product is made at a reacting temperature of between 550 and 890 DEG C, at a growth temperature of between 160 and 870 DEG C, and at an atmosphere pressure of between 10<5> and 10<3> Pa. The evaporation source can be doped with other elements or compounds. The method obtains a ZnO product with various shapes, sizes and structures through changing the process condition. Compared with reductant of using graphate as an electrode, the reductant of the invention is used to reduce the reacting temperature up to between 100 and 500 DEG C. Through the method, a ZnO micronano or nano structure can grow at a lower temperature on a substrate which is easily oxidized or easily deteriorated in oxygen rich environment or/and high-temperature environment.

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)

    Title

Cited By (1)

    Publication numberPublication dateAssigneeTitle
    CN-101807606-AAugust 18, 2010吉林大学n型氧化锌/p型金刚石异质结隧道二极管及其制作方法